A novel acceleration sensor with overload protection was proposed, which was based on the vacuum electronic technology, the Micro Electro-Mechanical Systems ( MEMS) technology, the sensor technology and the principle of Cold Electrode Field Emission. 结合真空微电子技术、MEMS技术和传感器技术,依据冷阴极场致发射的原理,设计了一种带过载保护功能的新型真空微电子加速度传感器。
Also, the structure of the Dee acceleration electrode is introduced. 并简单介绍加速电极结构。
Moreover, the motion inertia force could be achieved via the acceleration curve. 3 、 The fluid-solid interaction model of tool electrode and working liquid has been built. 通过仿真得到加速度曲线然后计算得到机床部件的运动惯性力。3、建立了工具电极和工作液的流固耦合模型。